[1]桑明煌,李新华,余子星,等.基于对称金属包覆波导的高精度微位移测量[J].江西师范大学学报(自然科学版),2013,(02):111-115.
 SANG Ming-huang,LI Xin-hua,YU Zi-xing,et al.High-Precision Measurement of Small Distance Utilizing the Symmetrical Metal-Cladding Waveguide[J].Journal of Jiangxi Normal University:Natural Science Edition,2013,(02):111-115.
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基于对称金属包覆波导的高精度微位移测量()
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《江西师范大学学报》(自然科学版)[ISSN:1006-6977/CN:61-1281/TN]

卷:
期数:
2013年02期
页码:
111-115
栏目:
出版日期:
2013-03-01

文章信息/Info

Title:
High-Precision Measurement of Small Distance Utilizing the Symmetrical Metal-Cladding Waveguide
作者:
桑明煌;李新华;余子星;戴海浪
江西师范大学物理与通信电子学院,江西南昌,330022;江西省星子中学,江西九江,332800
Author(s):
SANG Ming-huang;LI Xin-hua;YU Zi-xing;DAI Hai-lang
关键词:
对称金属包覆波导超高阶导模微位移测量
Keywords:
symmetry metal-cladding waveguideultra-high order modemicro-displacement measurement
分类号:
TN252
文献标志码:
A
摘要:
利用对称金属包覆波导中超高阶导模对入射角度高度灵敏的特性,提出了一种新型的实时高精度微位移测量方法.与将压电材料置于导波层中不同,该方法是在压电材料上粘合一平面镜,并放置于一凸透镜的焦平面处.当对压电材料加载电压而产生微位移时,经凸透镜返回的2条边缘光线会产生微小的入射角度变化,从而引起反射光强的急剧改变.该方法的微位移测量精度和测量范围分别为0.5和170nm,且具有结构简单、实时测量等优点,可应用于微机电系统和精密控制领域.
Abstract:
Based on the ultra-high order mode with high-sensitivity to the variance of incidence angle in the symmetry metal-cladding waveguide,a real-time and high-precision micro-displacement measurement method has been theoretically analyzed and experimentally demonstrated.It is shown that the piezoelectric material is not placed in the guiding layer but connected with one mirror,and that the combination of piezoelectric material and mirror is located at the focal plane of one convex lens.In particular,when a voltage is applied to the piezoelectric material,the resulted micro-displacement will give rise to a tiny variance of incidence angle in the light coming back from the convex lens,and then a sharp change in the reflected light intensity will be obtained.The experiment shows that the micro-displacement measurement resolution is 0.5 nm and the measurement range is 170 nm,and furthermore,this scheme is of simple structure,real-time measurement and may be of potential application in micro-electro-mechanical systems and fine control area.

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备注/Memo

备注/Memo:
国家自然科学基金(61265001);江西省教育厅科技课题(GJJ13237)
更新日期/Last Update: 1900-01-01