参考文献/References:
[1] Cooper E B,Post E R,Griffith S,et al.High-resolution micromachined interferometric accelerometer [J].Appl Phys Lett,2000,76(22):3316-3318.
[2] 张群雁,周震,冯丽爽,等.新型微米光栅加速度计光学结构研究 [J].光学学报,2010,30(6):1796-1799.
[3] 熊幸果,陆德仁,卢平芳,等.微力微位移天平测试方法 [J].传感技术学报,1997,10(2):47-52.
[4] Kuwamura S,Yamaguchi L.Wavelength scanning profilometry for real-time surface shape measuement [J].Appl Opt,1997,36(19):4473-4482.
[5] Yang Haijun,Deibel J,Nyberg S,et al.High-precision absolute distance and vibration measurement with frequency scanned interferometry [J].Appl Opt,2005,44(19):3937-3944.
[6] Wang S F,Chiu M H,Chen Weiwu,et al.Small-displacement sensing system based on multiple total internal refelctions in heterodyne interferometry [J].Appl Opt,2009,48(13):2566-2573.
[7] Howard L,Stone J,Fu J.Real-time displacement measurements with a fabry-perot cavity and a diode laser [J].Precis Eng,2001,25(4):321-335.
[8] Zhao Shuangshuang,Hou Changlun,Zhang Juan,et al.A high-resolution displacement sensor based on a grating interferometer with the phase modulation technique [J].Meas Sci Technol,2012,23(10):105102.
[9] Kohno T,Ozawa N,Miyamoto K,et al.High precision optical surface sensor [J].Appl Opt,1988,27(1):103-108.
[10] Margheri G,Mannoni A,Quercioli F.High-resolution angular and displacement sensing based on the excitation of surface plasma waves [J].Appl Opt,1997,36(19):4521-4525.
[11] Chiu M H,Shih B Y,Lai Chih W,et al.Small absolute distance measurement with nanometer resolution using geometrical optics principles and a SPR angular sensor [J].Sens Actuators A,2008,141(1):217-223.
[12] Lu Haifeng,Cao Zhuangqi,Li Honggen,et al.Study of ultrahigh-order modes in a symmetrical metal-claddign waveguide [J].Appl Phys Lett,2004,85(20):4579-4581.
[13] Chen Fan,Cao Zhuangqi,Shen Qishun,et al.Nanoscale displacement measurement in a variable-air-gap optical waveguide [J].Appl Phys Lett,2006,88(16):161111.
[14] Chen Fan,Cao Zhuangqi,Shen Qishun,et al.Picometer displacement sensing using the ultrahigh-order modes in a submillimeter scale optical waveguide [J].Opt Express,2005,13(25):10061-10065.
[15] Yu Tianyi,Li Honggen,Cao Zhuangqi,et al.Oscillating wave displacement sensor using the enhanced Goos-Hanchen effect in a symmetrical metal-cladding optical wavegudie [J].Opt Lett,2008,33(9):1001-1003.
[16] Chen Fan,Cao Zhuangqi,Shen Qishun,et al.Optical approach to angular displacement measurement based on attenuated total reflection [J].Appl Opt,2005,44(26):5393-5397.
[17] Gu J H,Chen G,Cao Zhuangqi,et al.An intensity measurement refractometer based on a symmetric metal-clad waveguide structure [J].J Phys D:Appl Phys,2008,41(18):185105.
[18] Xiao Pingping,Wang Xianping,Sun Jingjing,et al.Biosensor based on hollow-core metal-cladding waveguide [J].Sens Actuators A,2012,183:22-27.
[19] 桑明煌,余子星,李翠翠,等.相位调制型振荡场生化传感器的理论分析 [J].中国科学:G辑,2012,42(2):122-126.
[20] Sun Jingjing,Wang Xianping,Chen Yin,et al.Optical transduction of E Coli O157:H7 concentration by using the enhanced Goos-Hanchen shift [J].J Appl Phys,2012,112(8):83104.
[21] Li Honggen,Cao Zhuangqi,Lu Haifeng,et al.Free-space coupling of a light beam into a symmetrical metal-cladding optical waveguide [J].Appl Phys Lett,2003,83(14):2757-2759.
[22] Liu Xiangmin,Yang Qingfen,Qiao Zhi,et al.Physical origin of large positive and negative lateral optical beam shifts in prism-waveguide coupling system [J].Opt Comm,2010,283(13):2681-2685.
[23] Liao Shujen,Wang Shinn Fwu,Chiu Minghuang.A new method for measuring a small displacement by using the critical angle method and confocal technology [J].SPIE 2005,5635:211-218.
[24] Kabashin A V,Patskovsky S P,Grigorenko A N.Phase and amplitude sensitivities in surface plasmon resonance bio and chemical sensing [J].Opt Express,2009,17:21191-21204.