[1]陈飞彪,谢贤清,刘德永,等.电子级Ⅲ族金属有机化合物的制备与应用进展[J].江西师范大学学报(自然科学版),2021,(04):426-431.[doi:10.16357/j.cnki.issn1000-5862.2021.04.17]
 CHEN Feibiao,XIE Xianqing,LIU Deyong,et al.The Progress in Preparation and Application of Electronic Grade III Metal Organic Compounds[J].Journal of Jiangxi Normal University:Natural Science Edition,2021,(04):426-431.[doi:10.16357/j.cnki.issn1000-5862.2021.04.17]
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电子级Ⅲ族金属有机化合物的制备与应用进展()
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《江西师范大学学报》(自然科学版)[ISSN:1006-6977/CN:61-1281/TN]

卷:
期数:
2021年04期
页码:
426-431
栏目:
化学
出版日期:
2021-08-10

文章信息/Info

Title:
The Progress in Preparation and Application of Electronic Grade III Metal Organic Compounds
文章编号:
1000-5862(2021)04-0426-06
作者:
陈飞彪1谢贤清2刘德永2郭晓红2
1.江西师范大学化学化工学院,江西 南昌 330022; 2.江西师范大学国家单糖化学合成工程技术研究中心,江西 南昌 330022
Author(s):
CHEN Feibiao1XIE Xianqing2LIU Deyong2GUO Xiaohong2
1.College of Chemistry and Chemical Engineeering,Jiangxi Normaol University,Nanchang Jiangxi 330022,China; 2.National Monosaccharide Chemical Synthesis Engineering Technology Research Center,Jiangxi Normal University,Nanchang Jiangxi 330022,China
关键词:
电子级金属有机化合物 制备方法 化合物半导体 配合物提纯技术
Keywords:
electronic grade metal organic compounds preparation methods compound semiconductors purification technologies of complexes
分类号:
O 627.3
DOI:
10.16357/j.cnki.issn1000-5862.2021.04.17
文献标志码:
A
摘要:
该文介绍了Ⅱ族、Ⅲ族金属有机化合物的合成方法、性质及其应用领域,特别对当前应用广泛的电子级Ⅲ族金属有机化合物的提纯方法做了系统介绍,指出目前电子级Ⅲ族金属有机化合物在应用过程中存在的不足及需改进的方向.重点阐述了迭氮类Ⅲ族金属有机化合物在MOCVD技术的未来应用中的优势及其研究进展,展望了电子级Ⅲ族金属有机化合物对于促进半导体技术科技进步的重要意义和需要进一步研究发展的方向.
Abstract:
The synthetic methods,properties and application fields of the metal organic compounds of the second and third ethnic groups are introduced,and the purification methods of the electronic grade III metal organic compounds,which are widely used at present,are systematically studied.The shortcomings and improvement directions of electronic grade III metal organic compounds are pointed out.The advantages and research progress of azide III metal organic compounds in the future application of MOCVD technology are emphasized.Finally,the importance of electronic grade III metal organic compounds in promoting the technological progress of semiconductor technology is prospected,and the direction for further research and development is also pointed out.

参考文献/References:

[1] 阎圣刚,周科衍.金属有机化合物在制备半导体材料中的应用 [J].材料导报,1994,8(6):46-48,54.
[2] 薛科创,闫晓前.金属有机化合物的制备技术 [J].山东化工,2014,43(1):98-100.
[3] Hussain R A,Badshah A,Younis A,et al.Iron selenide films by aerosol assisted chemical vapor deposition from single source organometallic precursor in the presence of surfactants [J].Thin Solid Films,2014,567(30):58-63.
[4] 李爱珍.分子束外延锑化物激光器、探测器材料与器件研究 [J].材料导报,2001,15(2):20-21.
[5] Condorelli G G,Baeri A,Anastasi G,et al.Precursor mutual interactions in the kinetics of MOCVD of SBT films [J].Materials Science in Semiconductor Processing,2002,5(2):167-171.
[6] Fujita T,Saiki A,Hashizume T.Fabrication of YSZ thin film by electrochemical deposition method and the effect of the pulsed electrical fields for morphology control [J].Archives of Metallurgy and Materials,2015,60(2):945-948.
[7] Abbott J K C,Dougan B A,Xue Ziling.Synthesis of organometallic compounds [M].J Wiley and Sons,2011.
[8] Beirau T,Paulmann C,Bismayer U.Recrystallization of metamict allanite [J].Mineralogical Magazine,2011,74(4):2393-2399.
[9] 乔兴龙,胡学一,方云.Friedel-Crafts酰基化催化剂的研究进展 [J].化工进展,2012,31(12):2702-2707.
[10] Wingstrand E,Lundgren S,Penhoat M,et al.Dual Lewis acid:Lewis base activation in enantioselective additions to aldehydes [J].Pure and Applied Chemistry,2006,78(2):409-414.
[11] 赵地顺,葛京京,翟建华,等.Lewis酸性离子液体催化合成丁二酸二异丙酯 [J].化工学报,2014,65(2):561-569.
[12] 柳晗宇,杨中天,余子迪,等.“受阻Lewis酸碱对”化学的研究进展 [J].大学化学,2016,31(4):1-11.
[13] 李桂连,任长友,董为民,等.氯化钕异丙醇合物/三异丁基铝催化剂活性中心的分离与聚合 [J].应用化学,2011,28(9):993-998.
[14] 王芳,张高杰.电位滴定法测定三乙基铝催化剂己烷溶液中铝含量 [J].化工管理,2015(20):155-156.
[15] 袁彩雷,张求龙,江子雄.利用脉冲激光沉积技术制备镍纳米颗粒及其生长过程中的应变场模拟 [J].江西师范大学学报:自然科学版,2012,36(2):111-115.
[16] 赵飞燕,张小东,王永旺,等.三甲基镓制备与提纯技术的研究进展 [J].稀有金属与硬质合金,2017,45(6):24-30.
[17] 舒万艮,李雄,王歆燕.三甲基铟三乙基铟制备的研究进展 [J].稀有金属,1999,23(3):224-226.
[18] 贾辉,陈一仁,孙晓娟,等.预通三甲基铝对AlN薄膜的结构与应变的影响 [J].发光学报,2012,33(1):82-87.
[19] 王筠,刘芳,李全良,等.N-十二烷基丙烯酰胺的合成研究 [J].江西师范大学学报:自然科学版,2013,37(4):342-344.
[20] Trivedi J S,Bera A,Jewrajka S K.Alkyl amine functional dextran macromonomer:based thin film composite loose nanofiltration membranes for separation of charged and neutral solutes [J].Journal of Applied Polymer Science,2017,134(37):45301-45309.
[21] Fischer R A,Woll C.Layer-by-layer liquid-phase epitaxy of crystalline coordination polymers at surfaces [J].Angewandte Chemie International Edition,2009,48(34):6205-6208.
[22] Bräse S,Gil C,Knepper K,et al.Organic azides:an exploding diversity of a unique class of compounds [J].Angewandte Chemie International Edition,2005,44(33):5188-5240.
[23] 周彦水,霍欢,周诚,等.3-叠氮基-4-酰氯肟基呋咱的合成及其热稳定性 [J].合成化学,2011,19(5):665-666,687.
[24] 葛忠学,丁可伟,李陶琦.多叠氮化合物 [J].化学世界,2012,53(11):695-700.
[25] Merriman Barry,R D Team Ion Torrent,Rothberg Jonathan M.Progress in ion torrent semiconductor chip based sequencing [J].Electrophoresis,2012,33(23):3397-3417.
[26] 端点星.半导体芯片工艺节点演变路径分析 [J].集成电路应用,2017,34(10):53-60.
[27] 李东生.对半导体显示/芯片产业,建议加大支持的力度 [J].集成电路应用,2017,34(4):1.
[28] Jain N,Hudait M K.III-V multijunction solar cell integration with silicon:present status,challenges and future outlook [J].Energy Harvesting and Systems,2014,1(3/4):121-145.
[29] 王传坤,刘辉.基于ZnO缓冲层的有机太阳能电池数值的分析 [J].江西师范大学学报:自然科学版,2017,41(4):412-415.
[30] Jandt K D,Mills R W.A brief history of LED photopolymerization [J].Dental Materials,2013,29(6):605-617.
[31] Lee Alex C H,Elson Daniel S,Neil Mark A,et al.Solid-state semiconductors are better alternatives to arc-lamps for efficient and uniform illumination in minimal access surgery [J].Surgical Endoscopy,2009,23(3):518-526.
[32] Walsh S T,Boylan R L,McDermott C,et al.The semiconductor silicon industry roadmap:epochs driven by the dynamics between disruptive technologies and core competencies [J].Technological Forecasting and Social Change,2005,72(2):213-236.
[33] Hong Minghwei,Al E A E.Cheminform abstract:nanometer-thick single-crystal hexagonal Gd2O3 on GaN for advanced complementary metal-oxide-semiconductor technology [J].Chem Inform,2010,41(9):4970-4974.

备注/Memo

备注/Memo:
收稿日期:2021-01-23
基金项目:国家重点研发计划(2017YFB0307803)和江西省教育厅青年课题(170217)资助项目.
作者简介:陈飞彪(1983—),男,江西高安人,讲师,博士,主要从事新能源领域电子材料研究.E-mail:chenfeibiao@jxnu.edu.cn
更新日期/Last Update: 2021-08-10