[1]周小岩,韩立立*,张翔翔,等.二氧化钛/硅异质结光电导传感器的阻抗特性研究[J].江西师范大学学报(自然科学版),2022,(04):394.[doi:10.16357/j.cnki.issn1000-5862.2022.04.10]
　ZHOU Xiaoyan,HAN Lili*,ZHANG Xiangxiang,et al.The Study on Impedance Characteristics of Titanium Dioxide/Silicon Heterojunction Photoconductive Sensor[J].Journal of Jiangxi Normal University:Natural Science Edition,2022,(04):394.[doi:10.16357/j.cnki.issn1000-5862.2022.04.10]
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二氧化钛/硅异质结光电导传感器的阻抗特性研究()
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《江西师范大学学报》（自然科学版）[ISSN:1006-6977/CN:61-1281/TN]

卷:
期数:
2022年04期
页码:
394
栏目:
物理学
出版日期:
2022-07-25

文章信息/Info

Title:
The Study on Impedance Characteristics of Titanium Dioxide/Silicon Heterojunction Photoconductive Sensor
文章编号:
1000-5862(2022)04-0394-05
作者:
周小岩; 韩立立*; 张翔翔; 王立鑫; 杨喜峰
中国石油大学(华东)理学院,山东 青岛 266580
Author(s):
ZHOU Xiaoyan; HAN Lili*; ZHANG Xiangxiang; WANG Lixin; YANG Xifeng
College of Science,China University of Petroleum,Qingdao Shandong 266580,China
关键词:
TiO2/Si异质结;  交流阻抗;  光电导机制
Keywords:
TiO2/Si heterojunction;  alternating(AC)impedance;  photoconductivity mechanism
分类号:
O 475; TN 36
DOI:
10.16357/j.cnki.issn1000-5862.2022.04.10
文献标志码:
A
摘要:
采用喷雾热解法在单晶硅(Si)上制备二氧化钛(TiO2)薄膜,以金属铟作为背电极构成TiO2/Si异质结光电导传感器.采用X-射线衍射(XRD)、原子力显微镜(AFM)和拉曼光谱对样品的晶体微结构及表面形貌进行表征,通过紫外可见光谱研究TiO2薄膜的光学吸收性能,在不同光照强度(5、10、15、20 mW·cm-2)下通过高精度数字电桥TH2828测试异质结的交流阻抗,并给出了等效电路并解释其光电导机制.
Abstract:
Titanium dioxide(TiO2)thin film is prepared by spray pyrolysis on monocrystalline silicon(Si).TiO2/Si heterojunction photoconductive sensor is formed by metal indium as back electrode on TiO2 thin film.The crystal microstructure and surface morphology of TiO2 film are characterized by X-ray diffraction(XRD),atomic force microscopy(AFM)and Raman spectrum.The optical absorption property of TiO2 film are studied by UV-vis spectroscopy.The AC impedance of the samples under different visible light intensities are tested by precision digital bridge TH2828.The equivalent circuit diagram of the test device is given to explained the mechanism of photoconductivity.

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备注/Memo

备注/Memo:
收稿日期:2021-12-15
基金项目:国家自然科学基金(51777215)和中国石油大学(华东)教改课题(SZ201824,SJ-202037)资助项目.
通信作者:韩立立(1974—),女,山东博兴人,高级实验师,主要从事物理实验技术研究.E-mail:hanll@upc.edu.cn
更新日期/Last Update: 2022-07-25